Micromechanics and MEMS: A Practical Guide to Fabrication and Applications

Have you everwondered where all those different values for silicon Young's moduluscome from? Then the "Silicon as an anisotropic mechanical material"-tutorial (a pdf-file) is for you. This four page paper reviews thecrystallographic notation and shows how to calculate the silicon Young's modulus and Poisson's ratio from the stiffness tensor in anycrystal direction. You may also want to download this Matlab script for your own calculations.

micromechanics and mems pdf download

Download File: https://riagrancrocku.blogspot.com/?qc=2vGGhD

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